11 November 1999 3D profilometry based on the white light interferometer for rough surfaces
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Abstract
A new approach to 3-D profilometry for the white light interferometer is presented. Recently many different methods have been used to analyze the data obtained from white light interferometric profilers. The advantage of the interferometric methods is their precision that can reach a small fraction of a wavelength. But these profilers are usually limited to relatively smooth surfaces as well as being very expensive. We detail a simple way to construct a profiler that uses a simple and efficient algorithm. It treats the data in a fast and simple manner, thus reducing both the acquisition and the analysis time. The method is based on the Focus measurement that finds a maximum variance value. The method works well with rough surfaces.
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Seok-moon Ryoo, Seok-moon Ryoo, Yeong Kyeong Seong, Yeong Kyeong Seong, Tae-Sun Choi, Tae-Sun Choi, } "3D profilometry based on the white light interferometer for rough surfaces", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); doi: 10.1117/12.369215; https://doi.org/10.1117/12.369215
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