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11 November 1999 Magnetorheological finishing (MRF) in commercial precision optics manufacturing
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Finish polishing of highly precise optical surfaces is one of the most promising uses of magnetic fluids. We have taken the concept of magnetorheological finishing (MRF) from the laboratory to the optical fabrication shop floor. A commercial, computer numerically controlled (CNC) MRF machine, the Q22, has recently come on-line in optics companies to produce precision flat, spherical and aspheric optical components. MRF is a sub-aperture lap process that requires no specialized tooling, because the magnetically-stiffened abrasive fluid conforms to the local curvature of any arbitrarily shaped workpiece. MRF eliminates subsurface damage, smoothes rms microroughness to less than 1 nm, and corrects p-v surface figure errors to (lambda) /20 in minutes. Here the basic details of the MRF process are reviewed. MR fluid performance for soft and hard materials, the removal of asymmetric grinding errors and diamond turning marks, and examples of batch finishing of glass aspheres are also described.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Donald Golini, William I. Kordonski, Paul Dumas, and Stephen J. Hogan "Magnetorheological finishing (MRF) in commercial precision optics manufacturing", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999);


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