Noncontact estimate of grinding-induced subsurface damage

John C. Lambropoulos; Yi Li; Paul D. Funkenbusch; Jeffrey L. Ruckman

doi:10.1117/12.369213

11 November 1999 Noncontact estimate of grinding-induced subsurface damage

John C. Lambropoulos, Yi Li, Paul D. Funkenbusch, Jeffrey L. Ruckman

Proceedings Volume 3782, Optical Manufacturing and Testing III; (1999) https://doi.org/10.1117/12.369213
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

We review extensive data on measured subsurface damage and surface roughness resulting from lapping (loose abrasive grinding under fixed nominal pressure) and deterministic microgrinding (bound abrasive grinding under fixed nominal infeed) of commercial optical glasses with a large range of abrasive sizes. Subsurface damage is measured with the dimple method and related techniques. Surface roughness is measured with white light interferometry. Our results show that subsurface damage and its statistical scatter can both be estimated directly from the non-contact measurement of peak- valley surface roughness.

Citation Download Citation

John C. Lambropoulos, Yi Li, Paul D. Funkenbusch, and Jeffrey L. Ruckman "Noncontact estimate of grinding-induced subsurface damage", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369213

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