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11 November 1999 Noncontact estimate of grinding-induced subsurface damage
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Abstract
We review extensive data on measured subsurface damage and surface roughness resulting from lapping (loose abrasive grinding under fixed nominal pressure) and deterministic microgrinding (bound abrasive grinding under fixed nominal infeed) of commercial optical glasses with a large range of abrasive sizes. Subsurface damage is measured with the dimple method and related techniques. Surface roughness is measured with white light interferometry. Our results show that subsurface damage and its statistical scatter can both be estimated directly from the non-contact measurement of peak- valley surface roughness.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John C. Lambropoulos, Yi Li, Paul D. Funkenbusch, and Jeffrey L. Ruckman "Noncontact estimate of grinding-induced subsurface damage", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369213
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