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11 November 1999 Novel scanning technique for ultraprecise measurement of topography
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Abstract
The ultra-precise manufacturing of surfaces needs ultra- precise characterization. A novel optical scanning technique for testing flats, aspheres and complex surfaces is presented which offers ultra-precision for the measurement of slope and topography. The scanning technique needs no external references; it is traced back exclusively to the units of angle and length. The technique is based on a combination of two principles, namely to perform difference measurements for slopes with large shears and to use only a single pentagon prism for the difference measurements, keeping the angular position of the pentagon prism constant in space. The combination of these two principles eliminates the influences of all first- and second-order errors of the facility. Whole- body movement of the artefact under test and distortion of the facility itself do not result in errors.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ingolf Weingaertner, Michael Schulz, and Clemens Elster "Novel scanning technique for ultraprecise measurement of topography", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369198
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