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11 November 1999 Surface profilometry of a thick liquid lens on a solid surface using a high-numerical-aperture phase-shifting laser feedback interferometer
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Abstract
We have developed a model that predicts the effective optical path length (OPL) through a thick, refractive specimen on a reflective substrate as measured with a high numerical aperture, confocal interference microscope. Assuming an infinitesimal pinhole, only one 'magic ray' contributes to the measured OPL. It is possible to correct for the refractive errors and to unambiguously interpret the data. We present a comparison of our model predictions with experimental measurements of a fluid drop on a silicon substrate, obtained with a phase shifting laser feedback microscope.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David G. Fischer and Ben Ovryn "Surface profilometry of a thick liquid lens on a solid surface using a high-numerical-aperture phase-shifting laser feedback interferometer", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369214
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