25 October 1999 Optical surface profilometry in China
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Abstract
This article describes briefly the optical surface profileometry in China, including several result of its theory research, optical profiler development and some problems using the optical profiler.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Deyan Xu, Weixing Shen, "Optical surface profilometry in China", Proc. SPIE 3784, Rough Surface Scattering and Contamination, (25 October 1999); doi: 10.1117/12.366694; https://doi.org/10.1117/12.366694
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KEYWORDS
Optical components

Surface roughness

Surface finishing

Objectives

Modulation transfer functions

Optical testing

Phase shift keying

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