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25 October 1999 Polarization of light scattered by spheres on a dielectric film
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Abstract
Bidirectional ellipsometric measurements were conducted on a model system containing spherical particles on silicon surfaces coated with dielectric polymer films. The principal angle of polarization, (eta) (p), and the degree of linear polarization, PL(p), of the light scattered into directions out of the plane of incidence were measured using p-polarized, 532 nm light. Results are presented and compared to those from particles on a bare silicon substrate. Spheres of diameter 181 nm and 217 nm and film thicknesses ranging from 55 nm to 140 nm were used to test two theoretical models for light scattering: a Mie-surface double-interaction approximation and a finite-element time-domain implementation of Maxwell's equations. The measurements and the modeling demonstrate the application of bidirectional ellipsometry for characterizing the sizes of particulate contaminates on surfaces.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lipiin Sung, George W. Mulholland, and Thomas A. Germer "Polarization of light scattered by spheres on a dielectric film", Proc. SPIE 3784, Rough Surface Scattering and Contamination, (25 October 1999); https://doi.org/10.1117/12.366712
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