Spray cleaning with hydrofluorocarbon solutions

Robert Kaiser; Ryan S. Miller; Jeremy T. Cardin

doi:10.1117/12.366724

25 October 1999 Spray cleaning with hydrofluorocarbon solutions

Robert Kaiser, Ryan S. Miller, Jeremy T. Cardin

Proceedings Volume 3784, Rough Surface Scattering and Contamination; (1999) https://doi.org/10.1117/12.366724
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Cleaning by spraying with an inert liquid (such as a hydrofluorocarbon or hydrofluoroether) is shown to be an effective means of removing contaminating particles from the surfaces of objects. This type of cleaning has resulted in surface cleanliness levels of better than class 200. It was also determined that liquid spraying with these fluids provides a suitable replacement for CFC-113 as a cleaning medium. A variety of substrates, including silicon wafers, coated gold and aluminum coated mirrors, and zinc sulfide windows for FTIR (Fourier Transform Infra Red) spectroscopy test cells were spray cleaned to assess materials compatibility. None of these surfaces showed any apparent deleterious effects from spraying.

Citation Download Citation

Robert Kaiser, Ryan S. Miller, and Jeremy T. Cardin "Spray cleaning with hydrofluorocarbon solutions", Proc. SPIE 3784, Rough Surface Scattering and Contamination, (25 October 1999); https://doi.org/10.1117/12.366724

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