Microcomputer-controlled scanning Fabry-Perot interferometer

Weirui Zhao; Naiwen He; Genrui Cao

doi:10.1117/12.363834

28 September 1999 Microcomputer-controlled scanning Fabry-Perot interferometer

Weirui Zhao, Naiwen He, Genrui Cao

Proceedings Volume 3786, Optomechanical Engineering and Vibration Control; (1999) https://doi.org/10.1117/12.363834
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Using the technique of capacitance micrometry it is possible to measure very small displacements. Here, a microcomputer- controlled scanning Fabry-Perot interferometer is presented. In each scanning step, the parallelism of Fabry-Perot interferometer is monitored and adjusted in real-time with the aid of three capacitance micrometers - it is the feature of this system, where the readjustment and scanning are realized with three electrostrictive actuators, and the parallelism and the spacing of the mirrors are controlled by three capacitance micrometers. The light information from the interferometer is detected by a photo-detector. All of these are controlled by a microcomputer in order to realize the scanning and real-time control of Fabry-Perot interferometer. This system removes the problem of the nonlinear response and hysteresis associated with electrostrictive actuators and allows precise control of both parallelism and spacing of the mirrors.

Citation Download Citation

Weirui Zhao, Naiwen He, and Genrui Cao "Microcomputer-controlled scanning Fabry-Perot interferometer", Proc. SPIE 3786, Optomechanical Engineering and Vibration Control, (28 September 1999); https://doi.org/10.1117/12.363834

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