28 September 1999 Treatise on acoustical performance for state-of-the-art clean rooms
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Historically, clean room acoustical performance has been specified in the 65 dBA or NC-60 range. As line width geometries continue to shrink and metrology tools are introduced into the clean room at an increasing rate, some consideration on what constitutes appropriate and achievable clean room acoustical performance is long overdue. This paper addresses acoustical performance limitations for clean rooms under various air recirculation systems. The issue of what constitutes practical acoustical limits is also discussed. These limitations are put into the context of manufacturer specifications for metrology tools while addressing resulting consequences.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christopher A. Papadimos, Christopher A. Papadimos, } "Treatise on acoustical performance for state-of-the-art clean rooms", Proc. SPIE 3786, Optomechanical Engineering and Vibration Control, (28 September 1999); doi: 10.1117/12.363795; https://doi.org/10.1117/12.363795

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