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2 July 1999 Liquid crystal on VLSI silicon optical phased array
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Abstract
Currently VLSI foundries are pushing for small feature size and higher operating voltages. These ongoing developments in integrated circuit fabrication processes result in devices exhibiting excellent electrical performance, but poor optical quality. Increased reflectivity and planarization are necessary to produce high efficiency beam steering devices. Steps taken to improve optical performance of silicon backplanes will also be discussed.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jay E. Stockley, Darius Subacius, and Steven A. Serati "Liquid crystal on VLSI silicon optical phased array", Proc. SPIE 3787, Optical Scanning: Design and Application, (2 July 1999); https://doi.org/10.1117/12.351635
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