2 July 1999 Synchronously working micromirrors for beam steering: design and application aspects
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A new application of synchronously working micromachined silicon mirrors for a laser beam projection technique producing images on the whole circumference of a cylindrical shaped screen will be discussed within this contribution. The mechanically active mirror area of 12 square millimeters has been divided into 49 single mirrors in order to achieve both fast steering and light power distribution. Diffraction of the laser beam due to the regularly arranged mirrors and its influence to the contrast has been experimentally determined on a small sized projection system. Analytically calculated thermal effects on the mirror shape caused by light power dissipation and heat transfer correspond to the measurements by thermographic imaging and topographic metrology. Investigations concerning phase lag and amplitude difference between the mirrors lead to a design of specially shaped hinges with reduced sensitivity to the main fabrication tolerances.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steffen Kurth, Steffen Kurth, Kersten Kehr, Kersten Kehr, Jan Mehner, Jan Mehner, Christian Kaufmann, Christian Kaufmann, Ramon Hahn, Ramon Hahn, Ralf Seidel, Ralf Seidel, Wolfram Doetzel, Wolfram Doetzel, Thomas Gessner, Thomas Gessner, } "Synchronously working micromirrors for beam steering: design and application aspects", Proc. SPIE 3787, Optical Scanning: Design and Application, (2 July 1999); doi: 10.1117/12.351657; https://doi.org/10.1117/12.351657


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