30 June 1999 Glancing angle deposition: recent research results
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Abstract
Unique thin film microstructures have been fabricated with the Glancing Angle Deposition (GLAD) technique. These porous, thin films can be engineered with a variety of different morphologies to sub-micron dimensions, including helical, post, and chevron or zigzag microstructures. This paper reports some recent results in study and application of films deposited using GLAD, namely: the use of low pressure, long throw sputtering to produce porous titanium films; deposition of porous, structured ZrO2 films for use as thermal barriers; and measurement of the mechanical response of chiral or `microspring' thin films.
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Michael J. Brett, Michael J. Brett, Mary W. Seto, Mary W. Seto, Jeremy C. Sit, Jeremy C. Sit, Ken D. Harris, Ken D. Harris, Doug Vick, Doug Vick, Kevin Robbie, Kevin Robbie, } "Glancing angle deposition: recent research results", Proc. SPIE 3790, Engineered Nanostructural Films and Materials, (30 June 1999); doi: 10.1117/12.351243; https://doi.org/10.1117/12.351243
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