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22 September 1999 Subwavelength-sized phase-change recording with a silicon planar apertured probe
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Abstract
We propose and demonstrate a new optical near-field slider with a planar apertured probe array for optical memory. The slider was fabricated by utilizing anisotropical etching of a silicon membrane and anodic bonding of a silicon membrane and glass substrate. We also present for the first time a subwavelength-sized phase-change recording/reading by using the planar apertured probe array. Apertures were fabricated at the bottom end of the pyramidal grooves. A SiO2/AgInTe2/glass substrate was used as the recording medium. By scanning the planar apertured probe array, we obtained resolved images with line width of 250 nm.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takashi Yatsui, Motonobu Kourogi, Kazuo Tsutsui, Junichi Takahashi, and Motoichi Ohtsu "Subwavelength-sized phase-change recording with a silicon planar apertured probe", Proc. SPIE 3791, Near-Field Optics: Physics, Devices, and Information Processing, (22 September 1999); doi: 10.1117/12.363844; https://doi.org/10.1117/12.363844
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