12 November 1999 MEMS millimeter-wave reconfigurable components
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Abstract
We present microelectromechanical system (MEMS) RF component architectures that enable reconfigurable MEMS millimeterwave transceivers. In this paper, we focus on the component architectures for system integration. Different components, including reconfigurable Vee-antennas, planar impedance tuners, microswitches and variable capacitors, are demonstrated using the same three-polysilicon-layer processes. The reconfigurability of the Vee-antenna is demonstrated with beam-steering and beam-shaping functionality. The tuning ranges of planar backshort impedance tuners on different transmission lines are studied. We show that it is feasible to integrate the reconfigurable Vee-antenna with the planar impedance tuners. The mechanical architectures for microswitches, parallel- plate variable capacitors and circular variable capacitors are also investigated.
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Jung-Chih Chiao, Jung-Chih Chiao, Yiton Fu, Yiton Fu, Iao Mak Chio, Iao Mak Chio, Shengyong Cheng, Shengyong Cheng, Yoosin Kang, Yoosin Kang, } "MEMS millimeter-wave reconfigurable components", Proc. SPIE 3795, Terahertz and Gigahertz Photonics, (12 November 1999); doi: 10.1117/12.370211; https://doi.org/10.1117/12.370211
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