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12 November 1999 MEMS millimeter-wave reconfigurable components
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We present microelectromechanical system (MEMS) RF component architectures that enable reconfigurable MEMS millimeterwave transceivers. In this paper, we focus on the component architectures for system integration. Different components, including reconfigurable Vee-antennas, planar impedance tuners, microswitches and variable capacitors, are demonstrated using the same three-polysilicon-layer processes. The reconfigurability of the Vee-antenna is demonstrated with beam-steering and beam-shaping functionality. The tuning ranges of planar backshort impedance tuners on different transmission lines are studied. We show that it is feasible to integrate the reconfigurable Vee-antenna with the planar impedance tuners. The mechanical architectures for microswitches, parallel- plate variable capacitors and circular variable capacitors are also investigated.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jung-Chih Chiao, Yiton Fu, Iao Mak Chio, Shengyong Cheng, and Yoosin Kang "MEMS millimeter-wave reconfigurable components", Proc. SPIE 3795, Terahertz and Gigahertz Photonics, (12 November 1999);


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