12 November 1999 MEMS millimeter-wave reconfigurable components
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We present microelectromechanical system (MEMS) RF component architectures that enable reconfigurable MEMS millimeterwave transceivers. In this paper, we focus on the component architectures for system integration. Different components, including reconfigurable Vee-antennas, planar impedance tuners, microswitches and variable capacitors, are demonstrated using the same three-polysilicon-layer processes. The reconfigurability of the Vee-antenna is demonstrated with beam-steering and beam-shaping functionality. The tuning ranges of planar backshort impedance tuners on different transmission lines are studied. We show that it is feasible to integrate the reconfigurable Vee-antenna with the planar impedance tuners. The mechanical architectures for microswitches, parallel- plate variable capacitors and circular variable capacitors are also investigated.
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Jung-Chih Chiao, Jung-Chih Chiao, Yiton Fu, Yiton Fu, Iao Mak Chio, Iao Mak Chio, Shengyong Cheng, Shengyong Cheng, Yoosin Kang, Yoosin Kang, } "MEMS millimeter-wave reconfigurable components", Proc. SPIE 3795, Terahertz and Gigahertz Photonics, (12 November 1999); doi: 10.1117/12.370211; https://doi.org/10.1117/12.370211


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