27 October 1999 Experimental comparison of the properties and applications of sol-gel-derived inorganic and organic modified silica films on InP
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Abstract
In this paper, the properties and applications of both inorganic and organic modified silica films achieved on InP substrates are discussed based on experimental results. The fabrication of inorganic silica film is done using multiple spin coatings and rapid thermal processing at a temperature of 450 degree(s)C. The organic modified silica film is made also by multiple-spin coatings with a baking temperature of 200 degree(s)C. The surface quality, the crack-free critical thickness and the processing conditions of the two kinds of films are compared. The suitable applications for both types of films are discussed, based upon their different properties. From our experiments, we strongly believe that monolithic integration of active and passive devices could be obtained by means of hybridizing sol-gel derived materials and InP based III-V compounds.
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Jian Liu, Jian Liu, Yee Loy Lam, Yee Loy Lam, Yuen Chuen Chan, Yuen Chuen Chan, Yan Zhou, Yan Zhou, Boon Siew Ooi, Boon Siew Ooi, } "Experimental comparison of the properties and applications of sol-gel-derived inorganic and organic modified silica films on InP", Proc. SPIE 3803, Materials and Devices for Photonic Circuits, (27 October 1999); doi: 10.1117/12.366749; https://doi.org/10.1117/12.366749
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