27 October 1999 Micromirrors used for waveguide coupling
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Abstract
To confirm the credibility of the integrated optical circuits based on organic-inorganic materials, the problem of connection with an optical fiber, but also between inter and intra-cards or with a matrix of laser diodes such as VCSEL have to be resolved. In this work, we propose to integrate in an optical device some `objects' which could simplify the alignment procedure in the both last cases. We fabricated a 45 degree(s) tilted mirror made by EBID method. This mirror was placed right in front of an optical waveguide output.
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P. Falgayrettes, Paul Coudray, Jerome Porque, Pascal Gall-Borrut, "Micromirrors used for waveguide coupling", Proc. SPIE 3803, Materials and Devices for Photonic Circuits, (27 October 1999); doi: 10.1117/12.366753; https://doi.org/10.1117/12.366753
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