Micromirrors used for waveguide coupling

P. Falgayrettes; Paul Coudray; Jerome Porque; Pascal Gall-Borrut

doi:10.1117/12.366753

Abstract

To confirm the credibility of the integrated optical circuits based on organic-inorganic materials, the problem of connection with an optical fiber, but also between inter and intra-cards or with a matrix of laser diodes such as VCSEL have to be resolved. In this work, we propose to integrate in an optical device some `objects' which could simplify the alignment procedure in the both last cases. We fabricated a 45 degree(s) tilted mirror made by EBID method. This mirror was placed right in front of an optical waveguide output.

Citation Download Citation

P. Falgayrettes, P. Falgayrettes, Paul Coudray, Paul Coudray, Jerome Porque, Jerome Porque, Pascal Gall-Borrut, Pascal Gall-Borrut, } "Micromirrors used for waveguide coupling", Proc. SPIE 3803, Materials and Devices for Photonic Circuits, (27 October 1999); doi: 10.1117/12.366753; https://doi.org/10.1117/12.366753

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