Micromirrors used for waveguide coupling

P. Falgayrettes; Paul Coudray; Jerome Porque; Pascal Gall-Borrut

doi:10.1117/12.366753

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27 October 1999 Micromirrors used for waveguide coupling

P. Falgayrettes, Paul Coudray, Jerome Porque, Pascal Gall-Borrut

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Proceedings Volume 3803, Materials and Devices for Photonic Circuits; (1999) https://doi.org/10.1117/12.366753
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

To confirm the credibility of the integrated optical circuits based on organic-inorganic materials, the problem of connection with an optical fiber, but also between inter and intra-cards or with a matrix of laser diodes such as VCSEL have to be resolved. In this work, we propose to integrate in an optical device some `objects' which could simplify the alignment procedure in the both last cases. We fabricated a 45 degree(s) tilted mirror made by EBID method. This mirror was placed right in front of an optical waveguide output.

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P. Falgayrettes, Paul Coudray, Jerome Porque, and Pascal Gall-Borrut "Micromirrors used for waveguide coupling", Proc. SPIE 3803, Materials and Devices for Photonic Circuits, (27 October 1999); https://doi.org/10.1117/12.366753

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