9 September 1999 Development of a hightly transparent fluorescent optical sensor for transverse positioning of multiple elements with respect to a reference laser beam
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Proceedings Volume 3823, Laser Metrology and Inspection; (1999) https://doi.org/10.1117/12.360989
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany
Abstract
A new type of highly transparent (95%) two dimensional position sensor has been developed which allows the accurate positioning (below 10 micrometers r.m.s.) of successive elements to which each sensor is attached, transversely to a laser beam used as a reference straight line. The present useful area of the sensor is about 15 X 15 mm2, and can be further increased.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J.-Ch. Barriere, J.-Ch. Barriere, H. Blumenfeld, H. Blumenfeld, Michel J. Bourdinaud, Michel J. Bourdinaud, O. Cloue, O. Cloue, F. Molinie, F. Molinie, Phillippe Schune, Phillippe Schune, } "Development of a hightly transparent fluorescent optical sensor for transverse positioning of multiple elements with respect to a reference laser beam", Proc. SPIE 3823, Laser Metrology and Inspection, (9 September 1999); doi: 10.1117/12.360989; https://doi.org/10.1117/12.360989
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