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15 September 1999 Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining
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Proceedings Volume 3825, Microsystems Metrology and Inspection; (1999) https://doi.org/10.1117/12.364302
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany
Abstract
This paper presents the design and the fabrication steps of a novel integrated Mach-Zehnder interferometer with a phase modulation. A well-controlled Si machining as well as ZnO thin-film transducer integration on the same Silicon substrate permits to transform an optically passive device to an active device with sinusoidal phase modulation of 1.3 rad.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christophe Gorecki "Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining", Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); https://doi.org/10.1117/12.364302
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