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15 September 1999Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining
This paper presents the design and the fabrication steps of a novel integrated Mach-Zehnder interferometer with a phase modulation. A well-controlled Si machining as well as ZnO thin-film transducer integration on the same Silicon substrate permits to transform an optically passive device to an active device with sinusoidal phase modulation of 1.3 rad.
Christophe Gorecki
"Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining", Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); https://doi.org/10.1117/12.364302
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Christophe Gorecki, "Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining," Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); https://doi.org/10.1117/12.364302