15 September 1999 Qualification of optical measurement techniques for the investigation of material parameters of microcomponents
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Proceedings Volume 3825, Microsystems Metrology and Inspection; (1999) https://doi.org/10.1117/12.364297
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany
The growing development of modern microcomponents, structures and systems, makes it necessary to qualify large-scale approved measurement methods for the investigation in micro- scales. New materials and structural design are employed whose behavior cannot be easily predicted by FE-methods. Material properties and boundary conditions which are known form large- scale investigations may differ considerably for components with micro-scale dimensions. Other problems are due to the high aspect ratio of the micro structures which makes it necessary to consider the real shape of the component especially for reliability studies. Consequently a wide field has been opened for optical and dimensional metrology with respect to the investigation of microcomponents. Many methods which were tested successfully at big components can be used for microcomponents, too. But new ways must be followed especially in the field of loading, handling and observing micro-scale components. The article deals with optical techniques which have proven to be useful for the investigation of large-scale components and their qualification for the investigation of microcomponents. For the discussion the 3 problem classes mentioned above are taken into account.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wolfgang Osten, Wolfgang Osten, Werner P. O. Jueptner, Werner P. O. Jueptner, Soenke Seebacher, Soenke Seebacher, Torsten Baumbach, Torsten Baumbach, "Qualification of optical measurement techniques for the investigation of material parameters of microcomponents", Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); doi: 10.1117/12.364297; https://doi.org/10.1117/12.364297

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