15 September 1999 Vibration measurement of microstructures by means of laser-optical modal analysis
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Proceedings Volume 3825, Microsystems Metrology and Inspection; (1999) https://doi.org/10.1117/12.364305
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany
Abstract
Investigation of the vibrational behavior under operating conditions are often necessary for realization and inspection of sensor and actuator functions even to assure of there high reliability. Also the behavior under separate excitations is important to know especially for applications of sensors and actuators into vibrating environments. Relating to this exceptionally high demands are exemplary required for aviation, automotive industries, and mechanical engineering. The paper describes the coupling of a Single-Point Laser Vibrometer with a Modal Analysis System. Beside detection of eigenfrequencies a contactless determination of mode shapes is possible too. For vibrational characterization of scanning micromirrors were to investigate both the vibrational behavior under operating conditions and under separate excitation. Gradual improvements to develop an appropriate test stand for vibration measurements at these microstructures are represented. Also measurements taken with Laserscanning Vibrometry and Holographic Interferometry are discussed. Results of Laseroptical Modal Analysis could serve as foundation for calculations and numerical simulations.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rene Schnitzer, Norbert Ruemmler, Volker Grosser, Bernd Michel, "Vibration measurement of microstructures by means of laser-optical modal analysis", Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); doi: 10.1117/12.364305; https://doi.org/10.1117/12.364305
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