24 November 1999 Aeroloader: an overhead transport system for semiconductor automation
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Abstract
Automation of semiconductor manufacturing is a very large segment of the automation industry. The automation ranges from machinery capable of handling a single semiconductor wafer to automated material handling system that transport large numbers of these wafers at one time.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gerald Friedman, Gerald Friedman, } "Aeroloader: an overhead transport system for semiconductor automation", Proc. SPIE 3832, Sensors and Controls for Intelligent Machining and Manufacturing Mechatronics, (24 November 1999); doi: 10.1117/12.371175; https://doi.org/10.1117/12.371175
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