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20 August 1999 Enhanced-resolution Michelson interferometer for displacement measurement
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Abstract
Intensity division interferometers have been long used in displacement measurement with resolution down to 0.01 micron. However, commercial multi-frequency laser interferometers are very expensive and difficult to be embedded in motion control experiments. In this paper, a single frequency Michelson interferometer combined with an 128 X 1 intensity integration photodiodes to produce a high resolution and wide range displacement detection is presented. With the digital signal microprocessor, plus signal filtering technique, the displacement changes to wavelength/2 has been measured by using PZT stack with high voltage driver. With the He-Ne laser as the light source, the precision is about 0.3 micron, the change pattern of the peak maximum of the fringes corresponding to the change pattern of the PZT driving signal, and the best results are obtained with sine-wave at different frequencies. This system has the features of high resolution, broadband, non- contact measurement. Because of lower cost, easier implementation, faster DSP processing, it is very likely to be embedded in the concurrent control system.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jing Su and Timothy N. Chang "Enhanced-resolution Michelson interferometer for displacement measurement", Proc. SPIE 3833, Intelligent Systems in Design and Manufacturing II, (20 August 1999); https://doi.org/10.1117/12.359514
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