18 August 1999 Automatic control system of a microrobot-based microassembly station using computer vision
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Proceedings Volume 3834, Microrobotics and Microassembly; (1999) https://doi.org/10.1117/12.357820
Event: Photonics East '99, 1999, Boston, MA, United States
The assembly of complex microsystems consisting of several single components (i.e. hybrid microsystems) is a difficult task that is seen to be a real challenge for the robotics research community. It is necessary to conceive flexible, highly precise and fast microassembly devices and methods. In this paper, the development of a microrobot-based microassembly station is presented. Mobile piezoelectric microrobots with dimensions of some cm3 and with at least 5 DOF can perform various manipulations either under a light microscope or within the vacuum chamber of a scanning electron microscope. The control system of the microassembly station is described. The main attention is given to a vision-based sensor system for automatic robot control and a re-configurable parallel computer array enabling the station to work in real-time.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sergej Fatikow, Axel Buerkle, Joerg Seyfried, "Automatic control system of a microrobot-based microassembly station using computer vision", Proc. SPIE 3834, Microrobotics and Microassembly, (18 August 1999); doi: 10.1117/12.357820; https://doi.org/10.1117/12.357820


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