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18 August 1999 MEMS-based single-cell penetration force sensor
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Proceedings Volume 3834, Microrobotics and Microassembly; (1999) https://doi.org/10.1117/12.357829
Event: Photonics East '99, 1999, Boston, MA, United States
Abstract
The rapid development of reproductive biology has created a need for quantifying penetration forces during artificial fertilization. It has been demonstrated that the success of such procedures heavily depends on the mechanics of penetration of the egg's zona and membrane. To quantify the forces during intracytoplasmic injections we have developed a MEMS based force sensor. Deep RIE and fusion bonding are used to fabricate a variable capacitance type sensor. It is designed to measure the penetration force during intracytoplasmic injection of egg cells as well as other applications in the 1 - 500 micrometers N force range. The sensor measures tri-axial forces using a system of flexible beams subjected to bending and torsion. The process is relatively simple and allows for easy modification of the force range. A penetration pipette tip is attached to the sensor body using a low temperature bonding technique. Calibration, sensitivity and initial experimental data is provided.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eniko T. Enikov and Bradley J. Nelson "MEMS-based single-cell penetration force sensor", Proc. SPIE 3834, Microrobotics and Microassembly, (18 August 1999); https://doi.org/10.1117/12.357829
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