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9 August 1983 Recent Advances In Laser Processing Of Semiconductors
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Proceedings Volume 0385, Laser Processing of Semiconductor Devices; (1983) https://doi.org/10.1117/12.934935
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States
Abstract
Over the years laser applications to semiconductor device processing have evolved along distinct lines. Those involving interactions and effects in the inactive part of the chip came first, while those involved alterations in material in the active part of the chip have attracted more interest recently. In this review paper we highlight examples from each of these categories.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Kestenbaum "Recent Advances In Laser Processing Of Semiconductors", Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); https://doi.org/10.1117/12.934935
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