9 December 1999 Improving measurement resolution in white light interferometry
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Abstract
In white light interferometry, the measurement resolution is limited relatively by the coherence length of the light source, usually in tens of fringes. By the use of two wavelength combination and multi-wavelength combination source approaches, the equivalent coherence length can be decreased to a few fringe level and nearly one fringe level respectively. By employing a discrete fringe pattern transform technique, the equivalent coherence length can be further reduced to a sub-fringe level, representing a high potential in high precision white light interferometric measurement.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dongning Wang, Dongning Wang, Chester Shu, Chester Shu, } "Improving measurement resolution in white light interferometry", Proc. SPIE 3860, Fiber Optic Sensor Technology and Applications, (9 December 1999); doi: 10.1117/12.372979; https://doi.org/10.1117/12.372979
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