8 September 1999 Large-area thin film preparation by a hybrid scanning laser ablation
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Proceedings Volume 3862, 1999 International Conference on Industrial Lasers; (1999) https://doi.org/10.1117/12.361117
Event: International Symposium on Industrial Lasers, 1999, Wuhan, China
Abstract
In this paper an improved approach of large area superconducting thin film deposition by a hybrid scanning laser ablation is proposed, in which the pulsed laser radiates a target along a specially designed track just like planet-movement trajectory. The calculation results show that the thickness distribution of films is more homogeneous than that with the simple circle scanning ablation, and an optimum dependence of film thickness homogeneity on such parameters as scanning track, and scanning speed etc. is presented. The tentative experimental study indicates the effectiveness of this method.
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You-qing Wang, You-qing Wang, Xintang Huang, Xintang Huang, Chengwu An, Chengwu An, Qingming Chen, Qingming Chen, Qiyang Xu, Qiyang Xu, Zhaiguang Li, Zhaiguang Li, } "Large-area thin film preparation by a hybrid scanning laser ablation", Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); doi: 10.1117/12.361117; https://doi.org/10.1117/12.361117
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