Temporal characteristic of KrF excimer spectrum generated by discharge exciting without additional fluorine donor

Chang-yong Li; Liantuan Xio; Suotang Jia; Shusen Ma; Tianshu Hu; Zhaoping Zhang

doi:10.1117/12.361144

8 September 1999 Temporal characteristic of KrF excimer spectrum generated by discharge exciting without additional fluorine donor

Chang-yong Li, Liantuan Xio, Suotang Jia, Shusen Ma, Tianshu Hu, Zhaoping Zhang

Author Affiliations +

Proceedings Volume 3862, 1999 International Conference on Industrial Lasers; (1999) https://doi.org/10.1117/12.361144
Event: International Symposium on Industrial Lasers, 1999, Wuhan, China

Abstract

Without additional fluorine donor, the Kr/Ne mixture was excited in a excimer laser with Teflon surface preionization plates. The relative UV spectrum was obtained by ways of spectrograph and scanning. The formation of KrF excimer was affirmed. The temporal characteristic of relevant spectra was analyzed. It was found that the lasting time of the KrF excimer emission is about five times as much as that of the discharge current pulse. This indicates that the main process of forming KrF excimer is harpooning reaction but the ion combined reaction that is the main process in general KrF laser.

Citation Download Citation

Chang-yong Li, Liantuan Xio, Suotang Jia, Shusen Ma, Tianshu Hu, and Zhaoping Zhang "Temporal characteristic of KrF excimer spectrum generated by discharge exciting without additional fluorine donor", Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); https://doi.org/10.1117/12.361144

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