Paper
28 June 1999 Recent developments in optical disk mastering technology
G. J. Verhaart
Author Affiliations +
Abstract
The first step in the production process of both pre-recorded and recordable optical discs is mastering. In this process, the relief structure containing pre-recorded data and/or servo information is created in a master disc. The required structures can vary considerably in appearance and size.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. J. Verhaart "Recent developments in optical disk mastering technology", Proc. SPIE 3864, Joint International Symposium on Optical Memory and Optical Data Storage 1999, 386402 (28 June 1999); https://doi.org/10.1117/12.997561
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KEYWORDS
Optical discs

Digital video discs

Distance measurement

Optical storage

Photoresist processing

Critical dimension metrology

Electron beams

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