Aperture formation and mechanism of super-RENS

Junji Tominaga; Nobufumi Atoda

doi:10.1117/12.997590

28 June 1999 Aperture formation and mechanism of super-RENS

Junji Tominaga, Nobufumi Atoda

Proceedings Volume 3864, Joint International Symposium on Optical Memory and Optical Data Storage 1999; 38643B (1999) https://doi.org/10.1117/12.997590
Event: Optical Data Storage, 1999, Kauai, HI, United States

Abstract

The formation and mechanism of nanometer sized apertures of super-resolution nearfield structure (Super-RENS) was thermally, mechanically and optically investigated. An aperture of an antimony film forced in a high compressive stress showed the resolution of less than 100 nm, whereas the film forced in a tensile stress did not. An aperture formation mechanism is proposed by balance between the aperture formation energy and the surface energy including the internal stresses.

Citation Download Citation

Junji Tominaga and Nobufumi Atoda "Aperture formation and mechanism of super-RENS", Proc. SPIE 3864, Joint International Symposium on Optical Memory and Optical Data Storage 1999, 38643B (28 June 1999); https://doi.org/10.1117/12.997590

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