28 June 1999 Aperture formation and mechanism of super-RENS
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Abstract
The formation and mechanism of nanometer sized apertures of super-resolution nearfield structure (Super-RENS) was thermally, mechanically and optically investigated. An aperture of an antimony film forced in a high compressive stress showed the resolution of less than 100 nm, whereas the film forced in a tensile stress did not. An aperture formation mechanism is proposed by balance between the aperture formation energy and the surface energy including the internal stresses.
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Junji Tominaga, Junji Tominaga, Nobufumi Atoda, Nobufumi Atoda, } "Aperture formation and mechanism of super-RENS", Proc. SPIE 3864, Joint International Symposium on Optical Memory and Optical Data Storage 1999, 38643B (28 June 1999); doi: 10.1117/12.997590; https://doi.org/10.1117/12.997590
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