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10 December 1999 Closed-loop control of a micromachined membrane mirror
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Abstract
We have conducted laboratory experiments and measurements to characterize an OKO Technologies membrane mirror. In this paper, we describe a closed-loop demonstration system built around the OKO mirror.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David Charles Dayton, Steven C. Sandven, and John D. Gonglewski "Closed-loop control of a micromachined membrane mirror", Proc. SPIE 3866, Optics in Atmospheric Propagation and Adaptive Systems III, (10 December 1999); https://doi.org/10.1117/12.371323
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