30 December 1999 CANARY: a high-sensitivity ESD test reticle design to evaluate potential risks in wafer fabs
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Abstract
Electrostatic discharge (ESD) effects on reticles are a well known and dreaded phenomenon in the semiconductor industry. Isolated chrome structures in the scribe lane but also in the device content are susceptible to ESD damage during reticle handling or storage. So far electrical field measurements document the risk by numbers, but what is behind this number? Is it dangerous or just unpleasant? What is about cumulative effects? CANARY is the answer on this. An ESD test reticle with such a high sensitivity that several hundreds of handling cycles, representing reticle lifetimes of several months, can be simulated within a few hours. Customized versions can easily be designed in order to reflect customer specific design and technology requirements.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andreas Englisch, Andreas Englisch, Kees van Hasselt, Kees van Hasselt, Michel Tissier, Michel Tissier, K. C. Wang, K. C. Wang, } "CANARY: a high-sensitivity ESD test reticle design to evaluate potential risks in wafer fabs", Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, (30 December 1999); doi: 10.1117/12.373381; https://doi.org/10.1117/12.373381
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