Integration of optical proximity correction strategies in strong phase shifters design for poly-gate layers

Chris A. Spence; Marina V. Plat; Emile Y. Sahouria; Nicolas B. Cobb; Franklin M. Schellenberg

doi:10.1117/12.373322

30 December 1999 Integration of optical proximity correction strategies in strong phase shifters design for poly-gate layers

Chris A. Spence, Marina V. Plat, Emile Y. Sahouria, Nicolas B. Cobb, Franklin M. Schellenberg

Author Affiliations +

Proceedings Volume 3873, 19th Annual Symposium on Photomask Technology; (1999) https://doi.org/10.1117/12.373322
Event: Photomask Technology and Management, 1999, Monterey, CA, United States

Abstract

In this paper we discuss some of the problems and solutions discovered when implementing 2-mask strong phase shifter designs for the poly gate level in logic designs. Experimental results are presented showing pattern fidelity for different reticle designs. Simulations are presented indicating the improvement in pattern fidelity that can be expected from using OPC. Simulations, PSM assignment and model-based OPC correction are performed by the Calibre WORKbench, Calibre DRC, Calibre PSMgate and Calibre OPCpro tools from Mentor Graphics. In conclusion, we show that while fairly simple designs can be used to achieve 250 nm design rules (approximately 150 nm gates), in order to achieve both pattern fidelity as well as small feature size it is necessary to use 3-layer/phase-aware model-based OPC to correct for pattern distortion for design rules of 180 nm and below (approximately 100 nm phase-shifted gates).

Citation Download Citation

Chris A. Spence, Marina V. Plat, Emile Y. Sahouria, Nicolas B. Cobb, and Franklin M. Schellenberg "Integration of optical proximity correction strategies in strong phase shifters design for poly-gate layers", Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, (30 December 1999); https://doi.org/10.1117/12.373322

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available