Translator Disclaimer
30 December 1999 Proposed successor to barcode for automated reticle identification
Author Affiliations +
Abstract
Automated reticle identification faces new challenges as the industry approaches the arrival of 300 mm wafer fabs and the possible introduction of 230 mm reticles. Data Matrix is a useful and established encoding format, and is proposed as a successor to current barcode formats. The Data Matrix feasibility experiment is described and results discussed.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas White, Winthrop A. Baylies, Karl Andrew Bernal, John Merva, and William Bouvier "Proposed successor to barcode for automated reticle identification", Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, (30 December 1999); https://doi.org/10.1117/12.373380
PROCEEDINGS
10 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT


Back to Top