We have developed two puddle developers for ZEP7000. These developers are the mixtures of solvents having almost the same boiling points at higher temperature. Developer A and B are vaporized much slower than ZED500. Excellent CD uniformity is expected with them. Developers A and B are a stronger and a milder developers than ZED500, respectively. In this report, we focus on Developer B, taking the request of high resolution into consideration. We report the evaluation results of Developer B in comparison with ZED500.