30 December 1999 Puddle developers for ZEP 7000
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We have developed two puddle developers for ZEP7000. These developers are the mixtures of solvents having almost the same boiling points at higher temperature. Developer A and B are vaporized much slower than ZED500. Excellent CD uniformity is expected with them. Developers A and B are a stronger and a milder developers than ZED500, respectively. In this report, we focus on Developer B, taking the request of high resolution into consideration. We report the evaluation results of Developer B in comparison with ZED500.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kakuei Ozawa, Kakuei Ozawa, Nobunori Abe, Nobunori Abe, } "Puddle developers for ZEP 7000", Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, (30 December 1999); doi: 10.1117/12.373350; https://doi.org/10.1117/12.373350


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