30 August 1999 High-speed laser chemical vapor deposition of amorphous carbon fibers, stacked conductive coils, and folded helical springs
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Proceedings Volume 3874, Micromachining and Microfabrication Process Technology V; (1999) https://doi.org/10.1117/12.361225
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
This paper reports advances in high-pressure, 3D laser chemical vapor deposition, which may be used to prototype insulating and metallic high-aspect-ratio microstructures. In this case, carbon was grown from ethylene at pressures of 1-11 bar; fine free-standing fibers of diamond-like carbon were grown at linear rates exceeding 120,000 microns per second. This record-setting growth rate allows the computer- controlled prototyping of centimeter-scale structures in only 15-20 minutes. The volumetric growth rate is scalable in pressure and laser power so that, with a single tool, micron-size details may be deposited as readily as large objects. The morphology, diameter, and steady-state growth rate of the carbon fibers were mapped versus the input laser power, the pre-cursor pressure, and the gas flow rate. Using a rotating mandrel, helical, tapered, and folded coils were grown at rates of 10-25 micrometers /s. Flat carbon coils were also grown by steadily increasing the radius of the laser focus from the mandrel while maintaining a constant tangential velocity. Tungsten fibers and single crystals were also grown from WF6 and H2 gas mixtures.
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James L. Maxwell, James L. Maxwell, Mats Boman, Mats Boman, Kirk Williams, Kirk Williams, Kajsa Larsson, Kajsa Larsson, N. Jaikumar, N. Jaikumar, G. Saiprasanna, G. Saiprasanna, } "High-speed laser chemical vapor deposition of amorphous carbon fibers, stacked conductive coils, and folded helical springs", Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); doi: 10.1117/12.361225; https://doi.org/10.1117/12.361225
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