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30 August 1999 LIGA: metals, plastics, and ceramics
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Proceedings Volume 3874, Micromachining and Microfabrication Process Technology V; (1999)
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
LIGA, an acronym from the German words for Lithography, Electroforming, and Molding, is being evaluated worldwide as a method to produce microparts from engineering materials. Much of the work to date in LIGA has focused on producing metal microparts, with nickel as the most common material of choice. There is a growing interest in producing plastic parts replicated from LIGA metal masters due largely to microanalytical instrumentation and medical applications. These plastic replicates are generally made by either hot embossing or injection molding. Ceramic replication, of particular interest for high temperature applications or to produce piezoelectric or magnetic microparts, is also emerging as an area of interest. In this paper, a model of the LIGA exposure and development processes is presented along with the result of numerical optimization of mask design and process cost. The baseline processes for a cost- effective method to produce metal microparts are discussed, along with replication methods and result for plastics and ceramics.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jill M. Hruby, Stewart K. Griffiths, Linda A. Domeier, Alfredo M. Morales, Dale R. Boehme, Michelle A. Bankert, William D. Bonivert, John T. Hachman, Dawn M. Skala, and Aili Ting "LIGA: metals, plastics, and ceramics", Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999);

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