Micropattern fabrication by a specially designed microtool

Isamu Aoki; Toshinori Takahashi

doi:10.1117/12.361241

30 August 1999 Micropattern fabrication by a specially designed microtool

Isamu Aoki; Toshinori Takahashi;

Author Affiliations +

Proceedings Volume 3874, Micromachining and Microfabrication Process Technology V; (1999) https://doi.org/10.1117/12.361241
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

We have been investigating microforming techniques suitable for fabricating metal microcomponents. In this study, we used a microcutting-technology system equipped with a newly designed special shape cutting tool. As the shape of ordinary end-mills is complex, small dimensional sizes are more difficult to fabricate. This means that the microcutting of 3D components is also difficult. To overcome this problem, we proposed a simple oblique-cut micromill to be used exclusively for micromachining. A precision cutting device was also designed. The oblique-cut micromill is driven by a high-speed spindle motor of 50,000-10,000 rpm supported by air bearings. Results of experiments show that certain micropatterns can be fabricated on aluminum wire. Narrow parts of patterns that are 15-25 micrometers wide can also be fabricated. These results indicate that the system can be used to create 3D free-form micropatterns. In this paper, we report the result of the development of the micromill, machining system, and some fabricated items.

Citation Download Citation

Isamu Aoki, Toshinori Takahashi, "Micropattern fabrication by a specially designed microtool", Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); doi: 10.1117/12.361241; https://doi.org/10.1117/12.361241

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