30 August 1999 Micropattern fabrication by a specially designed microtool
Author Affiliations +
Proceedings Volume 3874, Micromachining and Microfabrication Process Technology V; (1999) https://doi.org/10.1117/12.361241
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
We have been investigating microforming techniques suitable for fabricating metal microcomponents. In this study, we used a microcutting-technology system equipped with a newly designed special shape cutting tool. As the shape of ordinary end-mills is complex, small dimensional sizes are more difficult to fabricate. This means that the microcutting of 3D components is also difficult. To overcome this problem, we proposed a simple oblique-cut micromill to be used exclusively for micromachining. A precision cutting device was also designed. The oblique-cut micromill is driven by a high-speed spindle motor of 50,000-10,000 rpm supported by air bearings. Results of experiments show that certain micropatterns can be fabricated on aluminum wire. Narrow parts of patterns that are 15-25 micrometers wide can also be fabricated. These results indicate that the system can be used to create 3D free-form micropatterns. In this paper, we report the result of the development of the micromill, machining system, and some fabricated items.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Isamu Aoki, Isamu Aoki, Toshinori Takahashi, Toshinori Takahashi, } "Micropattern fabrication by a specially designed microtool", Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); doi: 10.1117/12.361241; https://doi.org/10.1117/12.361241


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