Optical full-field technique for measuring deflection and strain on micromechanical components

Petra Aswendt; Roland Hoefling; Karla Hiller

doi:10.1117/12.360479

3 September 1999 Optical full-field technique for measuring deflection and strain on micromechanical components

Petra Aswendt, Roland Hoefling, Karla Hiller

Proceedings Volume 3875, Materials and Device Characterization in Micromachining II; (1999) https://doi.org/10.1117/12.360479
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Design, manufacturing and test of microcomponents generate new challenges for measurement techniques in general. The non-contacting operation of optical metrology makes it attractive to solve the task of measuring geometric quantities of microparts. So far, speckle interferometry (ESPI) is well established as a measuring tool for analyzing deformation, vibration and strain on a macroscopic level. This paper deals with possibilities and application limits of ESPI in the case of scaling down the object size below one millimeter.

Citation Download Citation

Petra Aswendt, Roland Hoefling, and Karla Hiller "Optical full-field technique for measuring deflection and strain on micromechanical components", Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); https://doi.org/10.1117/12.360479

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