3 September 1999 Optical full-field technique for measuring deflection and strain on micromechanical components
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Proceedings Volume 3875, Materials and Device Characterization in Micromachining II; (1999) https://doi.org/10.1117/12.360479
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
Design, manufacturing and test of microcomponents generate new challenges for measurement techniques in general. The non-contacting operation of optical metrology makes it attractive to solve the task of measuring geometric quantities of microparts. So far, speckle interferometry (ESPI) is well established as a measuring tool for analyzing deformation, vibration and strain on a macroscopic level. This paper deals with possibilities and application limits of ESPI in the case of scaling down the object size below one millimeter.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Petra Aswendt, Petra Aswendt, Roland Hoefling, Roland Hoefling, Karla Hiller, Karla Hiller, } "Optical full-field technique for measuring deflection and strain on micromechanical components", Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); doi: 10.1117/12.360479; https://doi.org/10.1117/12.360479
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