Relationship between internal stress and deformation of diaphragm at elevated temperatures using SEM

Akira Yamashita; Yuichi Sakai; Tsukasa Matsuura; Kazuhiko Tsutsumi

doi:10.1117/12.360470

3 September 1999 Relationship between internal stress and deformation of diaphragm at elevated temperatures using SEM

Akira Yamashita, Yuichi Sakai, Tsukasa Matsuura, Kazuhiko Tsutsumi

Proceedings Volume 3875, Materials and Device Characterization in Micromachining II; (1999) https://doi.org/10.1117/12.360470
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

This paper reports a study of the relationship between internal stress and deformation of diaphragm at elevated temperatures using scanning electron microscope. It is necessary to make a flat diaphragm in order to obtain good performance for various diaphragm-type sensors using heat transfer, such as flow sensors and accelerometers. When these sensors are used in high temperature environments, a flat diaphragm is required. Therefore, it is very important to observe and control the deformation behavior of a diaphragm at various temperatures. As far as we know, few results have been reported on the observation of deformed diaphragms at elevated temperatures.

Citation Download Citation

Akira Yamashita, Yuichi Sakai, Tsukasa Matsuura, and Kazuhiko Tsutsumi "Relationship between internal stress and deformation of diaphragm at elevated temperatures using SEM", Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); https://doi.org/10.1117/12.360470

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