Tunneling tip engine for microsensors applications

M. Edward Motamedi; Sangtae Park; Angus P. Andrews; Mohsen Khoshnevisan

doi:10.1117/12.360471

3 September 1999 Tunneling tip engine for microsensors applications

M. Edward Motamedi; Sangtae Park; Angus P. Andrews; Mohsen Khoshnevisan

Author Affiliations +

Proceedings Volume 3875, Materials and Device Characterization in Micromachining II; (1999) https://doi.org/10.1117/12.360471
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

We have developed and tested a tunneling tip engine in a multi-sensor module. The tested flip-chip device uses tunneling current for feedback to control deformation of a micromachined pressure membrane. The device includes a tunneling acceleration sensor based on a similar `seesaw' structure, but this paper only reports on the membrane structure. Several intermediate test beds were designed to characterize the strength and the mechanical properties of the membrane. The data collected from these experiments were used in simulation of the sensor structure prior to final fabrication. The resulting sensor, which uses the feedback actuation signal as the sensor output, is designed for closed loop control of the tip electron tunneling current. This type of closed-loop implementation provides better linearity and dynamic range than that of open-loop sensors.

Citation Download Citation

M. Edward Motamedi, M. Edward Motamedi, Sangtae Park, Sangtae Park, Angus P. Andrews, Angus P. Andrews, Mohsen Khoshnevisan, Mohsen Khoshnevisan, } "Tunneling tip engine for microsensors applications", Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); doi: 10.1117/12.360471; https://doi.org/10.1117/12.360471

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years