You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
3 September 1999Tunneling tip engine for microsensors applications
We have developed and tested a tunneling tip engine in a multi-sensor module. The tested flip-chip device uses tunneling current for feedback to control deformation of a micromachined pressure membrane. The device includes a tunneling acceleration sensor based on a similar `seesaw' structure, but this paper only reports on the membrane structure. Several intermediate test beds were designed to characterize the strength and the mechanical properties of the membrane. The data collected from these experiments were used in simulation of the sensor structure prior to final fabrication. The resulting sensor, which uses the feedback actuation signal as the sensor output, is designed for closed loop control of the tip electron tunneling current. This type of closed-loop implementation provides better linearity and dynamic range than that of open-loop sensors.
The alert did not successfully save. Please try again later.
M. Edward Motamedi, Sangtae Park, Angus P. Andrews, Mohsen Khoshnevisan, "Tunneling tip engine for microsensors applications," Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); https://doi.org/10.1117/12.360471