31 August 1999 MEMS fixtures for handling and assembly of microparts
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Proceedings Volume 3876, Micromachined Devices and Components V; (1999) https://doi.org/10.1117/12.360488
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
Fixtures are used to locate and hold parts during automated inspection, machining, or assembly. Microelectromechanical systems (MEMS) are tiny devices built in batch processes derived from integrated circuit fabrication. We describe a design for an array of MEMS microfixtures for parallel inspection, transport, and assembly of microfabricated parts. In a microfixture array, parts are brought near the fixture by random motion provided e.g. by vibratory agitation. The fixture clamps actively close when the parts enter the fixture. In large future fixture arrays, electrostatic or optical sensors integrated into the fixture cell can trigger this clamping function. Each cell operates autonomously and no global control is necessary. We fabricated a prototype cell consisting of two upfoldable fixture walls and a bimorph thermal actuator using a standard CMOS process. This approach allows batch fabrication of large numbers of cells on a single silicon wafer, as well as easy integration of sensors and actuators that autonomously close each cell when filled.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Isam N. Tahhan, Yan Zhuang, Karl F. Boehringer, Kristofer S. J. Pister, Ken Goldberg, "MEMS fixtures for handling and assembly of microparts", Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); doi: 10.1117/12.360488; https://doi.org/10.1117/12.360488
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