31 August 1999 Static and dynamic characterization of polysilicon surface-micromachined actuators
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Proceedings Volume 3876, Micromachined Devices and Components V; (1999) https://doi.org/10.1117/12.360491
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
A measurement system for static and dynamic characterization of silicon micromachines was developed. The computer- controlled system, using a HeNe-laser at 633 nm and a two- dimensional position sensor, allows simultaneous measurements of optical beam motion on two axes. To demonstrate the flexibility and functionality of the setup, measurements on various polysilicon surface-micromachined mirrors were performed. These measurements included tilt-angle versus driving-voltage curves, frequency responses, and motion perpendicular to the primary scan axis.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Volker Laible, Paul M. Hagelin, Olav Solgaard, Ernst Obermeier, "Static and dynamic characterization of polysilicon surface-micromachined actuators", Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); doi: 10.1117/12.360491; https://doi.org/10.1117/12.360491
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