19 August 1999 Development of a diffuser/nozzle-type micropump based on magnetohydrodynamic (MHD) principle
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Proceedings Volume 3877, Microfluidic Devices and Systems II; (1999) https://doi.org/10.1117/12.359355
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
This paper reports a research effort to microfabricate a nozzle-diffuser type of micropumps based on the magnetohydrodynamic (MHD) principle using LIGA technologies. The micropump is driven using the Lorentz force and can be used to deliver electrically conductive fluids. The major advantage of a MHD-based micropump is that it does not contain any moving parts. It may have potential applications in medicine delivery, biological and biomedical studies. Prototypes of MHD micropumps have been fabricated and tested. Significant bubble generation was observed due to electrolysis effect. These bubbles made the flow two-phase one and resulted in flow rate reduction. To overcome bubble generation, a new generation of MHD micropumps is currently under development. This new, diffuser/nozzle type of the MHD micropumps is based on the similar design as widely used in the diffuser/nozzle pumps with diaphragm.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Khee-Hang Heng, Khee-Hang Heng, Lei Huang, Lei Huang, Wanjun Wang, Wanjun Wang, Michael C. Murphy, Michael C. Murphy, "Development of a diffuser/nozzle-type micropump based on magnetohydrodynamic (MHD) principle", Proc. SPIE 3877, Microfluidic Devices and Systems II, (19 August 1999); doi: 10.1117/12.359355; https://doi.org/10.1117/12.359355


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