19 August 1999 Microfluidic system of microchannels with onsite sensors by silicon bulk micromachining
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Proceedings Volume 3877, Microfluidic Devices and Systems II; (1999) https://doi.org/10.1117/12.359345
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
The micro-channel fabricated on (110) silicon and bonded with Corning 7740 glass was frequently studied in micron- scale fluidic systems. The ultra-low value of hydraulic diameter and the high aspect-ratio configuration of the micro-channel make it the right stuff in cooling the high- flux heat-exchanging systems from the classical aspect of fluid dynamics. However, a lot of fundamental issues in such small-scale flow are still under dispute. Therefore, it is ideal to integrate temperature sensors and pressure sensors directly along the micro-channel to sense these mysterious variations. In this paper, by the silicon bulk- micromachining, the on-site micro-sensors are fabricated on the Corning 7740 glass before the substrate bonding. The micro piezo-resistive pressure sensor chip and the platinum temperature sensor with high TCR value all design on the glass substrate as on-site sensors. A new configuration of micro channel with detailed temperature and pressure outputs then provides a quite different information from the channel configuration by silicon surface-micromachining. The channel geometry of hydraulic diameter below 100 micrometers and the aspect ratio from 3 to 10 in this work could match the real application of the micro-channel heat sink to CPU cooling in the very-near future.
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Lung Jieh Yang, Shung-Wen Kang, "Microfluidic system of microchannels with onsite sensors by silicon bulk micromachining", Proc. SPIE 3877, Microfluidic Devices and Systems II, (19 August 1999); doi: 10.1117/12.359345; https://doi.org/10.1117/12.359345

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